| Authors |
Zinchenko Timur Olegovich, postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: scar0243@gmail.com
Pecherskaya Ekaterina Anatolevna, doctor of technical sciences, associate professor, head of sub-department of information and measuring equipment and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: pea1@list.ru
Pechersky Anatoly Vadimovich, doctor of technical sciences, professor, sub-department of information support for management and production, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: ura258@yandex.ru
Gurin Sergey Alexandrovich, candidate of technical sciences, head of department, CJSC Medtehnika (9 Srednyaya street, Penza, Russia), E-mail: teslananoel@rambler.ru
Sibrinin Boris Petrovich, senior lecturer, sub-department of information and measuring equipment and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: sibrinin@rambler.ru
Antipenko Vladimir Viktorovich, postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: v.antipenko7@yandex.ru
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| Abstract |
Background. Transparent conductive oxides are promising materials for the elements of functional electronics; they are used to create smart glasses in solar cells. This confirms the relevance of developing a technology for the synthesis of transparent conductive coat-ings with desired properties. This work is aimed at providing appropriate quality indicators of synthesized coatings based on the use of quality control tools.
Materials and methods. The article analyzes the influence of the technological regimes of the spray pyrolysis method (substrate temperature, pressure in the atomizer, distance between the atomizer and the substrate, solution volume, geometric location; substrate shape and size; atomization speed) on the parameters of transparent conductive oxides, grouped into three main groups: optical, morphological, electrophysical.
Results. As a result of the analysis of the applicability of seven wellknown quality control tools to the technological process of synthesis of oxide coatings with desired properties, Ishikawa diagrams, Pareto diagrams, and control cards have been developed that contribute to solving the problem of obtaining transparent conductive thin films with desired properties.
Conclusions. Based on the use of quality control tools, reasons are systematized for the quality indicators of transparent conductive coatings. The developed causal diagrams of Ishikawa made it possible to conclude that the main indicators affecting the quality of PPO are the choice of precursor and impurities for the solution, the preparation of the solution and substrate, the choice of the method of preparation and the design of the atomizer and reaction chamber. By developing a cumulative Pareto curve, it has been established that the most common defect is an unacceptably high surface resistance of coatings, and therefore, in order to improve the quality of coatings, corrective measures in the synthesis process aimed at reducing the resistance should be priority. In total, the considered quality control tools were introduced in the development of a technological process for the synthesis of transparent conductive oxides by spray pyrolysis.
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| Key words |
Pareto diagram, Ishikawa diagram, control card, transparent conductive oxides, thin films, quality parameters, spray – pyrolysis
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